PV09700 - SEMI PV97 - Specification for Silicon Powder Used in Polysilicon Production StdPbc-1012 SEMI C31 — Specification for

SEMI C31 — Specification for Methanol

2 It is the intent of this Standard to define messages to such a level of detail that some consistent host software may be constructed with only minimal knowledge of individual equipment

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processing-equipment users

9-0997 (technical revision)

PV09700 - SEMI PV97 - Specification for Silicon Powder Used in Polysilicon Production StdPbc-1012 SEMI C31 — Specification forSilicon powder is an important raw material for the production of polysilicon, it is used for the synthesis of trichlorosilane and hydrosilylation of silicon tetrachloride. The quality of silicon powder has direct influence on the quality of trichlorosilane. With the improvement of polysilicon production technology, the quality of polysilicon products is getting higher and higher, and the requirements on the quality of silicon powder are also getting